Chemical Vapor Deposition

(1) Insert quartz boat into the center of the furnace with a hook.


(2) Connect the inlet gas line and exhaust gas line to the two ends of the quartz tube accordingly. Follow the fitting elements as shown in the figure.



(3) Tighten the metal fitting with Allen key.




(4) Connect the pressure gauge. Notice there is an O-ring between the connection.

(5) Turn on the gas line with 3 valves by following the sequence.

(6) Set the Temperature and Duration of the experiment. If we would like to increase the temperature from 25oC to 400oC within 20 min and hold for 1 hour, the settings are:


C01: 25 (Initial temp)

T01: 20 (min)

C02: 400 (Target temperature)

T03: 60 (Holding time)

C03: 400 (Target temperature)

T03: -121 (End)


(7) Ensure the heating profile is correctly programmed. Press the “Heating Ready” button. Hold the “Run” button for 2 seconds


(8) When the program finishes, Off the main power.