Procedures of HIM Imaging
(1) Under the "Scanning" tab, grab the image in the "Imaging mode"
I define "Scanning mode" with the following parameters:
Scan parameter : Full Frame
Averaging Off
Scan size = 512 x 512
Dwell = 5 uSec
I define "Imaging mode" with the following parameters:
Scan parameter : Full Frame
Averaging On : 8 lines
Scan size = 1024 x 1024
Dwell = 2 uSec
(2) Save the image in EM tif.
Flood Gun
If necessary, you can turn on the flood gun for insulating samples.
Flood Gun >> Power Up >> Use flood gun to neutralize the positive charging effect on insulating samples.
(a) Adjust "Deflection" (Deflect the electron gun to the He scanning region)
(b) Flood time 100 u Sec; flood time 1000 uSec for very insulating material
(c) Do not touch the "Source Voltage", it gets damaged easily
(d) ET Grid Delay 100 u Sec
Note: After turning on the flood gun, you need to re-adjust astigmatism slightly as it affects the beam.