Procedures of HIM Imaging

(1) Under the "Scanning" tab, grab the image in the "Imaging mode"

  • I define "Scanning mode" with the following parameters:
    Scan parameter : Full Frame
    Averaging
    Off
    Scan size =
    512 x 512
    Dwell =
    5 uSec


  • I define "Imaging mode" with the following parameters:
    Scan parameter : Full Frame
    Averaging On :
    8 lines
    Scan size = 1024 x 1024
    Dwell =
    2 uSec

(2) Save the image in EM tif.

Flood Gun
If necessary, you can turn on the flood gun for insulating samples.
Flood Gun >> Power Up >> Use flood gun to neutralize the positive charging effect on insulating samples.
(a) Adjust "Deflection" (Deflect the electron gun to the He scanning region)
(b) Flood time
100 u Sec; flood time 1000 uSec for very insulating material

(c) Do not touch the "Source Voltage", it gets damaged easily

(d) ET Grid Delay 100 u Sec
Note: After turning on the flood gun, you need to re-adjust astigmatism slightly as it affects the beam.