Mounting the Sample
1) Taking out the sample stage from the Chamber
Exchange >> Transfer >> Retract sample with Rod >> Store >> Vent (see the image below)
Exchange – set the coordinates (x, y, z) for the rod to connect
Transfer – it starts pumps the airlock (E-2 Torr) and the open valve between the airlock and chamber
Store – the valve between airlock and chamber will close/open (pumping down)
Vent – vent the air load, it takes a few minutes
2) Loading the sample on the sample stage
After loading the sample, you may take a picture.
You can tilt the rod so that the groove is properly fit in.
Sample types:
(a) Conductive sample: Use little carbon tape, prevent it from degassing
(b) Non-conductive sample: Use gold tape to ground your sample; turn on the flood gun
3) Put the sample in the Chamber
Store >> Transfer >> Insert the rod to mount the sample into chamber >> Fully retract the rod (light up) >> Store
Ensure the sample stage is properly fitted into the grooves.
4) Wait until the chamber pressure is 1x10-7.
Because sometimes the sample will degases.
Set the working distance Z = 3.750 mm for the eucentric height with 0.5 mm substrate of gold dummy sample. The Max distance between the detector and Z = 0 is about 12 mm. It is advisable to keep your sample thickness below 4mm.