Start the Operation

1) Operation Center
>> NEVER Activate GFIS from here.
>> Activate the ET detector
>> Activate the flood gun (for insulating material)

2) Activated Lens 2 by clicking “Power Supply Enable”
>> Ramp up lens 2 voltage slowly to 18kV ~ 19kV until the working distance WD = 9.308 um (field of view 5um).
>> While ramping, you should monitor the leakage current ( make it less than 1 um)
Note: High leakage current will damage the cable.
Note: You can also use the hardware for lens 2 ramping, Obj knob and Mag knob
Note: If you would like to change the applied voltage from 26 keV to 30 keV, increase it stepwise: 26 --> 28 --> 30 keV.

3) Now we can turn on the beam
Helium # 10um aperture >> Switch on the He gas >>
Wait 1 min until E-6 Torr is stabilized >> Press “Start/Stop” in normal mode to begin the scanning
Note: We use a big aperture (“no aperture”) for trimer calibration.
Ne is very aggressive. Do not use Au as aperture, we shall use Mo as aperture instead.
Gold will get eroded away by the Ne ion beam. Mo is hard.

4) Locate the dummy sample >> Site (dummy location) >> Go
The dummy sample is gold.
Navigate the site of interest FOV = 100um.
Adjust magnification and focus such that 5um field of view

5) Adjust the ET detector:
Brightness 50%
For conducting sample: 40%
For non-conducting sample: 60%
Fix the brightness and control the contrast. Contrast increases the overall intensity of signal.