Nexsa G2
Instruments Introduction
Pre-experiment Check
Sample Mounting
Sample Loading
Sample Navigation (1)
Sample Navigation (2) Height setting Camera & SnapMap
Configure Experiments: Conventional XPS (Survey + Narrow)
Configure Experiments: Cleaning and XPS Depth Profiling
Exporting Data
Pre-experiment check
Sample Loading
Make sure your sample holder (including the top plate, samples, and clips) is below the safe maximum height. You can check this by using the "loading gauge arm" in the top storage drawer. This step ensures there is enough clearance so that sample holder will not touches the interior wall of chamber. Notes: Do not load samples that are touched by the loading test gauge. Do not attempt to load samples that are outside the edges of the top plate
Access Avantage software, navigate to the "Sample tab", and click the icon to vent the load lock and open the door.
Place the sample holder into the load lock, paying attention to the orientation of the holes as it can only fit in one way.
The sample is loaded onto the plate in the entry-lock as shown, ensuring that the two holes on the bottom of the holder (white arrows) engage correctly with the pins on the carrier plate (black arrows).
Return to Avantage Software, go to the "Sample tab", and click the icon to pump the load lock and "park" the sample.
Ensure that the load lock pressure is < 5.0 E-7 mbar before transferring the sample to the analysis chamber.
Notes: If samples do not degas, it typically takes around 20 minutes to reach < 5.0 E-7 mbar.
Sample Navigation
(1) Click Main command toolbar icon for optical view “Microscope icon”.
(2) Navigate to the sample and sites of interest.
You can move the sample stage is 3 ways:
(a) Double-click on the Platter View.
(b) Click on the direction icons (left/right/up/down) on the optical view.
(c) Double-click the Optival View
Notes: "Platter View" is an image captured in the load lock.
Notes: The current stage position is indicated by a red dot.
(3) Turn on the two light sources and adjust their illumination
Turn on "Analysis Chamber co-axial light" and "Analysis chamber side light".
You can adjust the brightness of two lights at the same time to get good contrast & brightness of sample features.
Notes: For rough surface "Analysis chamber side light" is perferred; for reflective surface "Analysis chamber co-axial light" is preferred.
(4) Adjust the Focus and Magnification of Sample
4.1 Adjust the focus (Z+/Z- buttons) and magnification (zoom+/zoom- buttons).
These buttons are located in the bottom left corner of the live view window.
Notes: You should not worry too much, because there is auto-height searching function (stepsize up to 100 μm).
Notes: To save an image, right-click on the optical view window you wish to save and select "Save Image."
If you save it as a .vgd file, it will preserve field of view information.
Complimentary technique for Navigation:
(1) Height setting Camera.
For sample with sharp features, adjust the focus using through-the-lens (TTL) camera and "height-setting" camera.
(2) SnapMap
To reveal elemental distributions of non-homogeneous samples that are optically not discernible. It scans very quickly with a short dwell time at the center energy of the element of interest and reconstructs the image into 500x500 pixels.
Configure Experiments: Conventional XPS (Survey + Narrow)
(1) Click the Experiment Tab
(2) Click to source insert icon to configure excitation source, in this case, the X-ray gun.
(3) Use either the toolbar or a control window.
X-ray spot size: Ranges from a smallest spot size of 10 μm to a largest spot size of 400 μm.
Flood Gun State: Set to ON for non-conductive samples
Explore "Group"
Allow autoheight function
(4) Save Experiment File
Hierarchical structure of the data file: excitation source, position, spectra (together sound like XPS).
Follow the nest hierarchy: experiment -> gun source -> point -> spectrum (point, line, area) -> gun shutdown.
VGX = experiment procedures setup file
VGD = save images and scan you can save it in terms of vcs file
VGP = all the meta data are saved
Notes: You can reuse the "Experiment" file for next experiment.
Tips: You can blank any experiment steps using "space" button on the keyboard.
The program will execute in the sequence that you have set up. Their status indicators at the bottom of the recipe window change from flashing blue to green. Grey means they are off.
For line scans, choose the center or starting and ending positions. Note that for different samples, the process needs to be repeated each time.
When data collection begins, the incoming raw data is shown in the Current data window. To perform analysis on the data, you must open a New processing view, which will put an empty grid into the main window.
You can drag the data point from the experiment tree into the new processing view and it will resize and pre-label fields to accommodate the scans that you have set up.
Configure Experiments: Cleaning and XPS Depth Profiling