Oxygen Plasma Cleaner for STEM Samples (JEOL EC-52000IC)

Operations of Oxygen Plasma Cleaner

1. Ensure that the vacuum chamber is at atmospheric pressure.

2. Remove the plug from the holder port.

3. Load the (S)TEM holder to the holder port.

4. Set the cleaning time using the timer (1, 5, 10, 15, 30, and 60 min).
   The oxygen plasma may oxidize/damage the sample substantially if the cleaning time is too long. For SrTiO3 bulk crystal that is exposed to the ambient for a long time, you should clean it for at least 30 minutes.

5. Press the "START/STOP" button - the green light inside the "START/STOP" switch lights up, and the rotary pump starts vacuum evacuation.

6. Once the vacuum evacuation is finished, the "VOLTAGE(V)" automatically display, signaling the glow discharging start.

7. Adjust the "VOLTAGE(V)" button between 290 and 310V, ensure that the voltage is just enough to sustain the dim glow.
   The oxygen plasma may oxidize/damage the sample substantially if the glow discharging is too strong. We shall keep observing and adjusting the voltage as the glow discharging as it takes some time to get fully stabilized. The voltage setting value also depends on the concentration of oxygen introduced into the chamber.

8. The device will stop automatically applying a voltage when the countdown is complete and moves to the vent operation. The "VOLTAGE(V)" display turns off automatically.

9. The START/STOP button blinks during the vent operation. Wait until the button stops blinking before extracting the (S)TEM holder from the holder port.