Scanning Electron Microscope

Scanning Electron Microscope (SEM)
FESEM, 7610, JEOL

Sample Preparations

(1) All samples must be in solid-phase, cleaned and completely dried, with dimensions less than 10 mm in length.

(2) Secure sample(s) to the sample holder/stub by using conductive carbon or copper tape.

(3) Coat the sample(s) using a sputter coater to improve electrical conductivity for better imaging resolution.

Loading samples

(1) Prepare samples and secure samples to the sample holder

(2) Ensure that the exchange chamber is under the “VENT” state

(3) Open the exchange chamber and slide the sample holder into the position

(4) Close the exchange chamber door, press and hold the “EVAC” button until it starts blinking, then wait until the blinking stops and the light is stable.

(5) Lay the specimen exchange rod down until it is horizontal

(6) Pull the grip (black portion of the rod) and rotate the grip clockwise so that the “In/Out only” label is upwards

(7) Push the grip inwards until the HLDR indicator light in on

(8) Pull out the grip until it stops at the end of the guiding rod

(9) Rotate the grip counterclockwise until “Up/Down only” is facing up

(10) Raise the specimen-exchange rod up until it is vertical.

(11) Select specimen holder "10 mm Multiple".

Imaging samples

(1) Press “Home Position” to raise the stage for observation Z = 8.0 mm

(2) Turn on the HT to 5 kV for normal operation when the vacuum gauge < 5.1 x E-4

(3) Turn on Beam/HT by clicking on the “ON” button.

(4) Adjust the sample position seen on the screen using the trackball/controls

(5) Adjust scanning mode, alignment, magnifications, focus, and image contrast/brightness for screen image.

(6) General focusing involves the following steps:

  • Start with lower magnification.

  • Focus using the Focus knob

  • Press “STIG” (button will light up) and adjust stigmatism correction using X-Y knobs.
    Normally done at 10,000x or higher magnification

  • Press “STIG” to return to the standard setup


(7) Adjust contrast or brightness either manually or press ACB

(8) Increase the magnification and adjust the focus again until the image is sharp.

(9) If the image sharpness is not obtainable, wobbling alignment adjustment is required.

  • Press “WOBB” (both the “WOBB” and “ALIGN” buttons will light up) at 20,000x magnifications.

  • The image may be shifting up/down/left/right. If this is the case, adjust using X-Y knobs until the image is no longer shifting but “pulsating” roughly in a fixed location.

  • Increase magnification and further adjust “WOBB” if required

Saving image

(1) Press “Fine View” and then Press “Freeze” Once, wait until the blinking stops.

(2) Click on File >> Image Save As, and save the image to the folder.