EDX Spectroscopy and Mapping

STEM Calibration setup

  1. Adjust it to be CL2 aperture #1

  2. Decide what probe size to use between "4C" and "6C".
    The "4C" probe size is brighter and needs a shorter time for enough signals.

  3. You may use Orius for calibration; Exposure time: 0.001 for instant image acquisition.

  4. After the A1 and B2 alignment, we shall re-PL align to the detector.


EDX Software

  1. Switch on the AZtec software >> New Project >> Browse >> Map.

  2. Thermal >> Operate >> Cooling >> Cold
    The EDX Detector works at -20oC, it is cold down by thermal electric coupling.
    Cold Temperature protects the detector and enhances the signal.

  3. Scan image >> "Setting AutoSetting": ON >> Drift correction with scan 512; dwell time 10.
    1024 is too slow for drift correction.

  4. ADF 1, 512 Always Autolock shift --> time 2X, 4X, and 8X buffer.
    For high magnification: 8X.
    For low magnification: 2X.

  1. View >> MinView: Auto Progression; monitoring the MiniView and adjust the focus if drifted
    Drift over time: Sample stage and Focus.

  2. You may choose different line Series: K or M to increase the brightness.

  3. When finish the EDX characterizations, remove the detector and set it to Standby mode (Room temp)

A positive x-tilted sample stage can improve the EDX signal.