How to Pump down the Chamber

How to Pump Down the Chamber?

1. Open the N2 gas cylinder.

2. Adjust the gas outlet to be 4 bars.
The left gauge shows you the pressure of the outlet, while the right gauge indicates the amount of remaining N₂ gas.

3. Connect the gas pipeline to the rough pump.
4-bar gas pressure is required to open up the solenoid valve of the rough pump.

4. Press the "Start" button on the Vacuum Power Unit.

You should be able to hear a loud noise once the solenoid valve is open. The working pressure of the UHV chamber is 1x E-7 mbar. For your reference, the working pressure of STEM located at SSLS is about 10^-5Pa (~ 10^-6 m bar).